LiteScope™

Scanning Probe Microscope designed for easy integration into the Scanning Electron Microscopes.

Explore a brand new Correlative Probe and Electron Microscopy technique.

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The LiteScope™ microscope

NenoVision_LiteScope_926x804

 

Correlative Probe and Electron Microscopy (CPEM)

The CPEM technology is the first solution on the market which enables to measure the SPM and SEM on the same place, same time using the same coordination system.

 

Simple probe exchange

The LiteScope™ offers easy and swift replacement of probes and samples. Significant advantage is also simple SEM mounting/dismounting in less than five minutes.

 

A wide range of imaging modes for SPM

The LiteScope™ incorporates a wide range of SPM imaging modes, such as STM, cAFM, ncAFM, EFM, MFM, KPFM and others which can be easily used by means of replaceable probes.

NenoVision introduces the unique CPEM technique

Correlative Probe and Electron Microscopy (CPEM) has been developed for application in Correlative Imaging (patent pending).

SEM technology

SEM technology

Scanning the sample by means of electrons for 2D analysis.

SPM technology

SPM technology

Scanning the sample by means of a physical probe.

CPEM technology

CPEM technology

Combining both techniques to provide unique correlative imaging.

Applications

Materials science and Nanotechnology

Materials science and Nanotechnology

The LiteScopeTM provides expected 3D characterization.

Quality control and Research & Development

Quality control and Research & Development

The LiteScopeTM offers characteristic of milled surface by FIB or GIS deposition.

Semiconductors, solar cells, memory devices, MEMS & NEMS

Semiconductors, solar cells, memory devices, MEMS & NEMS

The LiteScopeTM helps analyse surface structures and nano-devices.

News

New results on Zeiss microscope

2017-10-10

Current measurement results on the FEG SEM Zeiss Ultra Plus microscope in Brno at the Institute of Materials Sciences and Engineering.

* Source: SEM images by FEI company