Applications

The LiteScopeTM has a wide range of applications, from basic academic research to failure analyses in industry.

The system is particularly effective in those circumstances in which conventional SEM does not provide sufficient information about the sample and in which the user requires extension to 3D imaging.

CPEM technology, with its correlative imaging, is an ideal approach to correct analysis and simple image interpretation.

A tool for 3D analysis of the newly created structures is essential. Furthermore, the LiteScope™ is equipped with CPEM and other imaging modes that enable comprehensive analyses of prepared structures and nano-devices.

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Materials science and Nanotechnology

Materials science and Nanotechnology

The LiteScope™ offers the ideal tool for these scientific applications. Its direct advantage is evident for technologies such as FIB and GIS in which structures are formed directly within the SEM.

Quality control and Research & Development

Quality control and Research & Development

LiteScope™ helps identify surface structures, topography, roughness, contaminations, etc. These abilities will be appreciated especially by customers from industry, where it is particularly necessary to verify the quality of surfaces and thus save on losses due to failure.

Semiconductors, solar cells, memory devices, MEMS & NEMS

Semiconductors, solar cells, memory devices, MEMS & NEMS

The necessity for comprehensive analysis of nano-circuits and nano-devices has been increasingly pressing in recent years. The LiteScope™ provides demanded timely and appropriate extension to real 3D and multi-characterization of samples.

* Source: SEM images by FEI company