Application areas

The LiteScope™ offers the ideal tool for these scientific applications. Its direct advantage is evident for technologies such as FIB and GIS in which structures are formed directly within the SEM.

Semiconductors, solar cells, memory devices, MEMS & NEMS

Semiconductors, solar cells, memory devices, MEMS & NEMS

The LiteScopeTM helps analyse surface structures and nano-devices.

Materials science and Nanotechnology

Materials science and Nanotechnology

The LiteScopeTM provides expected 3D characterization.

Quality control and Research & Development

Quality control and Research & Development

The LiteScopeTM offers characteristic of milled surface by FIB or GIS deposition.