LiteScope™

Scanning Probe Microscope designed for easy integration into the Electron Microscopes.

The combination of complementary SPM and SEM techniques enables to use the advantages of both commonly used microscopy techniques.

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Description

The LiteScope™ provides a wide range of Scanning Probe Microscopy (SPM) imaging modes, which can be easily used via replaceable probes.

Comprehensive sample analysis including:

  • characterization of surface topography
  • mechanical properties
  • electrical properties
  • magnetic properties

 

The LiteScope™ may also be combined with other SEM accessories:

  • Focused Ion Beam (FIB)
  • Gas Injection System (GIS)

for fabrication of nano/microstructures and surface modifications. In this combination, the LiteScope™ offers easy and fast 3D inspection of manufactured structures.

 

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