Scanning Probe Microscope designed for easy integration into the Electron Microscopes.

The combination of complementary SPM and SEM techniques enables to use the advantages of both commonly used microscopy techniques.


Main benefits

  • Unique Correlative Probe and Electron Microscopy technology (CPEM)
  • Improving the performance of  SEM by SPM techniques
  • Comprehensive surface characterization – Topography, Roughness, Magnetic properties, Conductivity, Electrical properties
  • Ready for delivery with a new SEM
  • Ready as a plug-in for existing microscopes
  • Easy integration and mounting / removal in under five minutes
  • Both magnetic and fully non-magnetic versions
  • LiteScope™ also works as a stand-alone microscope
  • Compatible with FIB, GIS, EDX and other accessories
  • Easy and fast replacement of probes and samples
  • Self-sensing probes without optical detection, no laser adjustments
  • Commercially-available probes, wide range of measuring modes
  • Customer-made probes can be utilized with an appropriate probe holder designed to customer requirements
  • The measuring head may be retracted into the body of the LiteScope™ to free up space around the sample
  • Operation of SPM in tilted position (tilt 0° – 60°), min. WD = 5 mm
  • User-friendly software without special installation
  • Remote access to results and measurement setup

NenoVision LiteScope SEM1