LiteScope™

Scanning Probe Microscope designed for easy integration into the Electron Microscopes.

The combination of complementary SPM and SEM techniques enables to use the advantages of both commonly used microscopy techniques.

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Main benefits

  • Unique Correlative Probe and Electron Microscopy technology (CPEM)
  • World inovative technique for correlative micorscopy
  • Comprehensive surface characterization – Topography, Roughness, Magnetic properties, Conductivity, Electrical properties
  • Precies tip navigation on the sample
  • Easy integration and mounting / removal in under five minutes
  • Just plug and play
  • Compatible with FIB, GIS, EDX and other accessories

Other benefits

  • Self-sensing probes without optical detection, no laser adjustments
  • Commercially-available probes, wide range of measuring modes
  • Customer-made probes can be utilized with an appropriate probe holder designed to customer requirements
  • The measuring head may be retracted into the body of the LiteScope™ to free up space around the sample
  • Operation of SPM in tilted position (tilt 0° – 60°), min. WD = 5 mm
  • User-friendly software without special installation
  • Remote access to results and measurement setup

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