Scanning Probe Microscope designed for easy integration into the Electron Microscopes. The combination of complementary SPM and SEM techniques enables to use the advantages of both commonly used microscopy techniques.



The LiteScope™ provides a wide range of Scanning Probe Microscopy (SPM) imaging modes, which can be easily used via replaceable probes.

Comprehensive sample analysis including:

  • characterization of surface topography
  • mechanical properties
  • electrical properties
  • magnetic properties


The LiteScope™ may also be combined with other SEM accessories:

  • Focused Ion Beam (FIB)
  • Gas Injection System (GIS)

for fabrication of nano/microstructures and surface modifications. In this combination, the LiteScope™ offers easy and fast 3D inspection of manufactured structures.


LiteScope™ Application _ NenoVision_schema_01