Atomic Force Microscope designed for easy integration into the Scanning Electron Microscopes. The combination of complementary AFM and SEM techniques enables you to use the advantages of both commonly used microscopy techniques.


Main benefits

  • Unique Correlative Probe and Electron Microscopy technology (CPEM)
  • World innovative technique for correlative microscopy
  • Comprehensive surface characterization – Topography, Roughness, Magnetic properties, Conductivity, Electrical properties
  • Precies tip navigation on the sample
  • Easy integration and mounting / removal in under five minutes
  • Just plug and play
  • Compatible with FIB, GIS, EDX and other accessories

Other benefits

  • Self-sensing probes without optical detection, no laser adjustments
  • Commercially-available probes, wide range of measuring modes
  • Customer-made probes can be utilized with an appropriate probe holder designed to customer requirements
  • The measuring head may be retracted into the body of the LiteScope™ to free up space around the sample
  • Operation of SPM in tilted position (tilt 0° – 60°), min. WD = 5 mm
  • User-friendly software without special installation
  • Remote access to results and measurement setup