Atomic Force Microscope designed for easy integration into the Scanning Electron Microscopes. The combination of complementary AFM and SEM techniques enables you to use the advantages of both commonly used microscopy techniques.

LiteScope2 render

LiteScope available accessories

  • Self-sensing probes and probe holders
    • Tuning fork-based probes
    • Piezo-resistive probes
    • Conductive wire
  • Nanoindentation module
  • Sample rotation module
  • NenoCase
  • Load-lock mechanism
  • Stubs, tools, and sample holders

Self-sensing probes and probe holders

LiteScope supports a variety of self-sensing probes through proprietary probe holders.

LiteScope is not limited by the use of proprietary AFM probes but supports a broad variety of self-sensing probes from other manufacturers through appropriate probe holders. AFM probe can be easily inserted into the appropriate probe holder and then attached to the LiteScope’s universal holder acceptor – no screws or tools required.

Key Features

  • Utilization of a variety of self-sending probes
  • Easy and fast probe replacement
  • Universal acceptor for different probe holders
  • NenoView SW preset layouts for individual probes
  • Up to 3 input/output customer signals on probe holder

Tuning fork-based probes

The use of quartz crystal tuning fork for AFM application is based on the effect of high-Q resonance detuning when the tip mounted on the oscillating quartz approaches the surface. Tuning fork-based probes possess many advantageous properties such as high stiffness, stable oscillation, direct electrical actuation, and low-cost.

NenoVision_PROBE LiteScope Tuning fork based four probes
NP Conductive a PRSA

Piezo-resistive probes

Silicon cantilevers with an integrated piezo‐resistor are available in many different specifications suitable for various applications. 

PRSA - with an integrated piezo-resistor bridge and a thermal heater for self-sensing and self-actuating.

PRS - with an integrated piezo-resistor bridge, without a thermal heater


Conductive wire

Basic probe for STM and local voltage/current measurement in nano manipulator mode.

Conductive wire

Probes and Techniques

Material mechanical properties Application Probe
Atomic Force Microscopy (AFM) topography Akiyama, PRSA
Energy dissipation local elastic properties (tapping mode) Akiyama
Force Modulation Microscopy (FMM) local elastic properties (contact mode) PRSA
Force-distance curves local elastic properties (non-topographic) PRSA
Nanoindentation depth-dependent material characterization PRSA
Nanomanipulation various in-situ operations Akiyama, PRSA
Conductive AFM (C-AFM) conductivity map NenoProbe Conductive
Conductive CPEM (C-CPEM) conductivity map including insulated areas NenoProbe Conductive
Kelvin Probe Force Microscopy (KPFM) local surface potential NenoProbe Conductive
Electrical spectroscopy local electrical properties (non-topographic) NenoProbe Conductive
Scanning Tunneling Microscopy Sub-nanometer topography Pt-Ir wire
Piezoresponse Force Microscopy (PFM) piezoelectric domain imaging NenoProbe Conductive
Magnetic Force Microscopy (MFM) magnetic properties NenoProbe Magnetic




The nanoindentation module is a new module for the Atomic Force Microscope LiteScope. It allows to do quantitative measurements of mechanical porperties of samples, combined with AFM analysis during real time observation in SEM. Whole device can by attached and detached at any time, offering the choice between regular corelated AFM + SEM measurements or a unique combination of nanoindenter and AFM both in SEM.

Key Features

  • Comprehensive analysis by multiple techniques enabling complex understanding of nanomechanical properties in relation to sample composition and surface topography.
  • Nanoindent characterisation w ith time efficient and high resolution topography analysis.
  • Real-time SEM observation using SEM in parallel that provides enhanced control over the experimental conditions, as well as imaging and recording of nanoindentation process.
  • Specific nanoindentation tips assure quantitative analysis of mechanical properties.
  • Modular system allows a simple switch between configurations of AFM and nanoindentation.

Sample rotation module

The sample rotation module for AFM-in-SEM LiteScope enables mounting several samples into the SEM chamber simultaneously and performing their AFM and SEM correlative measurements without opening the chamber. The rotation module is also extremely useful for FIB milling procedures followed by an AFM analysis.

Key Features

  • Multi-sample analysis - LiteScope module accommodates several samples which can be analysed without the need of SEM chamber opening
  • Extended scanning area - The ability to rotate the samples enables to analyse sampled on the area with a diameter up to 2cm.
  • Exact sample positioning - Optimised FIB milling and adjustable orientation of the sample with respect to scanning and analyses of SEM techniques 


NenoCase is a new accessory for an Atomic Force Microscope LiteScope.

NenoCase is not only a user-friendly storage case but it also brings new possibilities that allow LiteScope to perform as a stand-alone device. It incorporates a passive anti-vibration system to ensure high-quality imaging outside the SEM chamber.

NenoCase can be purged with different gases used for measurements under different atmospheres.

Key Features

  • Storage of LiteScope in vacuum or desiccated environment to eliminate unwanted water adsorption during the storage out of SEM.
  • LiteScope full operation outside of SEM in vacuum or various atmospheres.
  • Equipped with passive vibration protection.
  • Possibility of using controlled atmosphere such as N2, Ar, etc.
  • Adjustable platform level.
  • The transparent design of the top cover allows the use of an optical or stereomicroscope to find structures or tip navigation.

NenoCase with camera

A digital camera with a custom-made stand is an optional NenoCase accessory that allows precise optical AFM tip navigation on the sample surface. The camera control is integrated directly into the NenoView software which enables long working distance.

Load-lock mechanism

LiteScope load-lock mechanism provides the possibility of loading samples and probes into LiteScope using a standard SEM air-lock / load-lock sample transfer system. ​

Load lock is an optional accessory for LiteScope, which enables quick and easy sample and/or AFM probe exchange without the need for disrupting the high vacuum in the SEM chamber.

The semi-automatic loading system consists of two adaptation arms:

  • The sample loading adaptor enables to load samples directly into LiteScope scan head by manual SEM transfer arm movement.
  • The probe loading adaptor enables to conveniently exchange the probe together with the probe holder.

Key Features/ Advantages​

  • Time reduction for sample/probe exchange​
  • No need to open and vent SEM chamber for sample or probe exchange​
  • Simple operation via NenoView SW
  • Usable with standard manual SEM Air-lock / Load-lock systems​
  • Semi-Automatic loading/unloading of ​samples​ and variety of AFM probes​

Stubs, tools and sample holders

LiteScope is compatible with many standard SEM stubs; nevertheless, custom stubs, sample holders, or a variety of specialized tools can be tailored for specific AFM-in-SEM applications.

AFM-in-SEM approach gives access to measurements and applications that were not possible with separate AFM and SEM systems. All the way from heated/cooled stage for e.g. life-science applications to a micro tensile tester for e.g. characterization of metals – let us know about your requirements to be able to take full advantage of the AFM-in-SEM concept.