LiteScope™

Atomic Force Microscope designed for easy integration into the Scanning Electron Microscopes. The combination of complementary AFM and SEM techniques enables you to use the advantages of both commonly used microscopy techniques.

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Correlative Probe and Electron Microscopy

       Next step for correlative imaging

Correlative microscopy is an approach that benefits from the imaging of the same object by two different techniques.

Correlative Probe and Electron Microscopy (CPEM) has been developed for the application using Correlative Imaging (patented) and brings the solution, which synchronizes:

  • the scanned area
  • resolution and image distortion
  • and enables to correlate both acquired AFM and SEM images in a realtime
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CPEM principle

CPEM enables simultaneous detection and acquisition of AFM and SEM signals at the same time and in the same place.

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Electron beam points close to the AFM tip with a constant offset. During scanning, the AFM tip and electron beam remain static – the sample is being scanned solely by the piezo scanner.

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Key CPEM advantages

  • CPEM provides multidimensional correlation imaging – images from a Scanning Electron Microscope are extended into 3D.
  • Using CPEM, it is possible to quickly and accurately distinguish the topographic and the material contrast in SEM images.
  • CPEM correlates, in an appropriate fashion, two or more SEM signals with the measured topography such as SE, BSE, EBIC, etc.
  • CPEM makes it possible to measure AFM and SEM simultaneously under the same specimen conditions, at the same measurement speed, etc.
  • The combined AFM and SEM scanning system enables an accurate image correlation, elimination of drift and other inaccuracies.

 In our NenoView software, SEM and AFM channels can be selected, viewed, and recorded at the same time.