LiteScope™

Get the best of both techniques at the same time 

Scanning electron microscopy and atomic force microscopy are the two most used, and, in fact, complementary techniques, for sample analysis in the (sub)nanometer range. The integration of AFM into SEM merges the strengths of both techniques, resulting in extremely time-efficient workflow and enables complex sample analysis that was difficult or readily impossible by conventional, separate AFM and SEM instrumentation:

• Fast and precise – AFM navigation to the region of interest by SEM 

• Two in one – complex sample characterization and advanced data correlation 

• In-situ conditions - crucial for sensitive samples and novel analyses 

Atomic Force Microscopy with Scanning Electron Microscopy

LiteScope incorporates a unique imaging technique called Correlative Probe and Electron Microscopy, shortly CPEM, enabling simultaneous acquisition of AFM and SEM data. LiteScope and the CPEM technology allow sample analysis in a way that was difficult or impossible by the two imaging technologies separately.

Together they bring new possibilities for advanced correlative imaging in a variety of scientific and industrial fields such as Material Sciences, Nanostructures, Semiconductors or Solar cells industry, Life sciences, and many more, defining their own category of correlative microscopy.