MoS2 grown on silica substrate

Molybdenum Disulfide (MoS2) is one of the 2D layered transition-metal dichalcogenides (TMDs). They are particularly of interest thanks to their interesting properties, such as flexibility, direct band gap, and unique electric and mechanical properties, however, as well inexpensive, earth-abundant catalysts, also useful as 2D semiconductors in advanced electronic devices. Thus, to ensure reliable and reproducible properties, the fabrication conditions of such monolayers need to be studied.

We present AFM-in-SEM solution for precise and complex analysis of MoS2 flakes grown by CVD on thick SiO2/Si. 

All techniques – SEM, AFM, EFM, and phase imaging – were measured at once on two sets of samples with diverse fabrication conditions. This approach enables the comparison of results to identify optimal fabrication parameters for achieving the desired sample features.

Measurement modes: AFM topography, SEM, EFM, phase imaging

LiteScope benefits:

  • Time-efficient multimodal analysis with a single probe
  • Straightforward signals’ correlation within NenoView software
  • Repeatable localization to the specific flakes

Sample courtesy of Prof. Zdenek Sofer, CTU Prague, Czech Republic