CPEM - Correlative Probe & Electron Microscopy

Correlative Probe and Electron Microscopy, shortly CPEM, is technology combining Atomic Force Microscopy (AFM) with Scanning Electron Microscopy (SEM). It allows simultaneous detection and acquisition of signals from both instruments.



How does it work?

During scanning, the SEM electron beam points close to the AFM tip with a constant offset. They both remain static, while the sample is moving thanks to the LiteScope's piezo scanner. This way, data from AFM and SEM microscopes can be acquired at the same time, in the same place, and under the same conditions.

Key CPEM advantages

  • Simultaneous multimodal data acquisition
    Unique technology developed by NenoVision enables simultaneous acquisition of AFM (Topography, C-AFM, MFM, KPFM...) and SEM (SE, BSE, EBIC) channels.
  • Unprecedented precision of image correlation
    CPEM allows rigorous multimodal data correlation with semi-automated image alignment, assuring its unprecedent precision. 
  • Time efficiency
    Using both AFM and SEM in a single scan, in the same place and under the same conditions significantly reduces the processing time compared to other correlative techniques that work with images acquired separately.