LiteScope

a unique AFM-in-SEM tool for multimodal in-situ correlative sample analysis

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AFM LiteScope located in SEM visualisation

Next level of imaging

Merge the power of AFM and SEM to explore the secrets of nanoworld

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Benefits of AFM-in-SEM solution

Combining the strengths of Atomic force microscope and Scanning electron microscope opens a wide range of possibilities. Thanks to seamless integration and one click operations is possible to correlate various measurements in real time.

See the unique benefits of the AFM-in-SEM solution, which assure you measurement results impossible to reach by separate AFM and SEM techniques. Check the biggest advantages of in-situ analysis by using them simultaneously!

Correlative multimodal sample analysis

Cutting-edge CPEM technology allows the simultaneous acquisition of AFM and SEM data and their seamless correlation.

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In-situ sample characterization

In-situ conditions inside the SEM ensure sample analysis at the same time, in the same place and under the same conditions.

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Precise localization of the region of interest

Extremely precise and timesaving approach uses SEM to navigate the AFM tip to the region of interest, enabling its fast & easy localization.

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Applications

AFM-in-SEM offers a broad field of sample analysis. Simultaneous utilization of Scanning electron microscope and Atomic force microscope is indispensable for advanced 3D correlative analysis while reducing overal image acquisition time.

The easy & efficient workflow assures fast and quality measurement results. With the ultra-high resolution and unparalleled accuracy of image alignment, the versatility of LiteScope brings the new possibilities into variety of application areas:

Material science