LiteScope AFM-in-SEM, unique tool for correlative in-situ analysis of microscopic samples


a unique AFM-in-SEM tool for multimodal in-situ correlative sample analysis

AFM LiteScope located in SEM visualisation

Next level of imaging

Merge the power of AFM and SEM to explore the secrets of nanoworld

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Benefits of AFM-in-SEM solution

Combining the strengths of Atomic force microscope and Scanning electron microscope opens a wide range of possibilities. Thanks to seamless integration and one click operations is possible to correlate various measurements in real time. 

See the unique benefits of the AFM-in-SEM solution, which assure you measurement results impossible to reach by separate AFM and SEM techniques. Check the biggest advantages of in-situ analysis by using them simultaneously!

Complex and correlative sample analysis
Correlative multimodal sample analysis

Cutting-edge CPEM technology allows the simultaneous acquisition of AFM and SEM data and their seamless correlation.

In-situ sample analysis icon
In-situ sample characterization

In-situ conditions inside the SEM ensure sample analysis at the same time, in the same place and under the same conditions.

Precise localization of the region of interest icon
Precise localization of the region of interest

Extremely precise and timesaving approach uses SEM to navigate the AFM tip to the region of interest, enabling its fast & easy localization.


AFM-in-SEM offers a broad field of sample analysis. Simultaneous utilization of Scanning electron microscope and Atomic force microscope is indispensable for advanced 3D correlative analysis while reducing overal image acquisition time.

The easy & efficient workflow assures fast and quality measurement results. With the ultra-high resolution and unparalleled accuracy of image alignment, the versatility of LiteScope brings the new possibilities into variety of application areas:

CPEM - unique technology for correlative imaging

Unique technology for correlative imaging

The Correlative Probe & Electron Microscopy (CPEM) is a cutting-edge technology developed specially for seamless integration of AFM and SEM.