LiteScope™

Atomic Force Microscope designed for easy integration into the Scanning Electron Microscopes. 

✓  Explore the capabilities of true correlative microscopy.

✓  Merge the forces of SEM and AFM.

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AFM-in-SEM LiteScope - compact accessory for your SEM

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Correlative Probe and Electron Microscopy (CPEM)

The CPEM technology is the first solution on the market which enables you to simultaneously measure the AFM and SEM signals in the same place, at the same time while using the same coordination system.

 

Simple probe exchange

LiteScope™ offers easy and swift replacement of probes and samples. A significant advantage is also simple SEM mounting/dismounting in less than five minutes.

 

A wide range of imaging modes for SPM

LiteScope™ incorporates a wide range of SPM imaging modes, such as STM, cAFM, ncAFM, EFM, MFM, KPFM and others which can be easily used by means of replaceable probes.

CPEM principle

CPEM enables simultaneous detection and acquisition of AFM and SEM signals at the same time and in the same place.

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Electron beam points close to the AFM tip with a constant offset. During scanning, the AFM tip and electron beam remain static – the sample is being scanned solely by the piezo scanner.

Main application fields

Material science

Material science

Characteristics of materials such as their structural, mechanical, chemical, electrical, and magnetic properties

Nanostructures

Nanostructures

In-situ analysis of special applications such as surface modification, failure analysis, and surface chemical analysis

Semiconductors

Semiconductors

AFM-in-SEM approach in semiconductor manufacturing, failure analysis, research, and development.

Life science

Life science

Measuring on biological samples at the nanoscale that are difficult or even impossible using separate imaging modalities.