LiteScope™
Atomic Force Microscope designed for easy integration into the Scanning Electron Microscopes.
Explore a brand new Correlative Probe and Electron Microscopy technique.
LiteScope™ Atomic Microscope
Correlative Probe and Electron Microscopy (CPEM)
The CPEM technology is the first solution on the market which enables to measure the AFM and SEM on the same place, same time using the same coordination system.
Simple probe exchange
LiteScope™ offers easy and swift replacement of probes and samples. Significant advantage is also simple SEM mounting/dismounting in less than five minutes.
A wide range of imaging modes for SPM
LiteScope™ incorporates a wide range of SPM imaging modes, such as STM, cAFM, ncAFM, EFM, MFM, KPFM and others which can be easily used by means of replaceable probes.
NenoVision introduces the unique CPEM technique
Correlative Probe and Electron Microscopy (CPEM) has been developed for application in Correlative Imaging (patented).
SEM technology
Scanning the sample by means of electrons for 2D analysis.
AFM technology
Scanning the sample by means of a physical probe.
CPEM technology
Combining both techniques to provide unique correlative imaging.
Applications
Materials science and Nanotechnology
LiteScopeTM provides expected 3D characterization.
Quality control and Research & Development
LiteScopeTM offers characteristic of milled surface by FIB or GIS deposition.
Semiconductors, solar cells, memory devices, MEMS & NEMS
LiteScopeTM helps analyse surface structures and nano-devices.
CPEM Correlative Probe and Electron Microscopy™
Correlative microscopy enables
a new insight into imaging of the
nanoworld. AFM LiteScope™
brings a revolutionary approach
into this subject.
Failure Analysis of Integrated Circuits by SPM/FIB/SEM - Delayering
Integration of SPM/FIB/SEM techniques significantly
simplify delayering process used for failure analysis,
quality control and R&D of integrated circuits.
News
* Source: SEM images by FEI company
