LiteScope AFM-in-SEM 

Unique Atomic Force Microscope LiteScope is designed to merge the strengths of AFM and SEM techniques, resulting in effective workflow and extending the possibilities of correlative microscopy and in-situ analysis that ware difficult or almost impossible by conventional instrumentation.

Simultaneous AFM and SEM measurement allows nanometer precise data correlation, making LiteScope a powerful tool for a variety of fields such as Material science, Nanotechnology, Semiconductors, Life science and other areas of research and industry.

Benefits of AFM-in-SEM solution

Complex and correlative sample analysis
Complex and correlative sample analysis

Cutting-edge CPEM technology allows the simultaneous acquisition of AFM and SEM data and their seamless correlation.

In-situ sample characterization
In-situ sample characterization

In-situ conditions inside the SEM ensure sample analysis at the same time, in the same place and under the same conditions.

Precise localization of the region of interest
Precise localization of the region of interest

Extremely precise and timesaving approach uses SEM to navigate the AFM tip to the region of interest, enabling its fast & easy localization.

LiteScope AFM-in-SEM in SEM chamber

Novel method of correlative imaging

Complex, yet time-efficient analysis via Correlative Probe and Electron Microscopy (CPEM) allows 3D correlative imaging that eliminates the need for repetitive tasks previously required to achieve similar kind of results.

All-in-one solution for automated in-situ analysis of multiple material properties enables unique combination of data such as topography, material contrast, mechanical or electrical properties resulting in three dimensional CPEM images.

LiteScope AFM-in-SEM in SEM measurement modes

Complex in-situ characterisation

AFM brings new inside-to-SEM method of characterisation, enabling the analysis of a broad range of properties:

Material mechanical properties

  • topography
  • local elastic properties (tapping & contact mode)
  • local sample hardness (non-topographic)
  • depth-dependent material characterization
  • various in-situ operations

Material magnetic properties

  • magnetic domain imaging

Material electro-mechanical properties

  • piezoelectric domain imaging

Material electrical properties

  • conductivity map (including insulated areas)
  • local surface potential
  • local electrical properties (non-topographic)
  • sub-nanometer topography

LiteScope benefits

Simple to use correlative microscopy
Simple to use correlative microscopy

Plug & play integration and automation allows to acquire all data you need for 3D correlation CPEM image in just a one scan and within few clicks.

Sub-nanometer 3D characterisation
Sub-nanometer 3D characterisation

Merge 2D SEM image with AFM topography during non-invasive 3D imaging in sub-nano resolution. Get complex information in identical conditions & timely manner.

Smart and effective workflow
Smart and time-efficient workflow

Reduce significantly the time to acquire the measurement data and get results much easier thanks to the intuitive product set-up.

LiteScope setup

LiteScope AFM-in-SEM setup

Installation package:

  • LiteScope – scan head
  • NenoBox – control unit
  • NenoView – control software
  • SEM adaptation plate
  • Vacuum feedthrough
  • Cabling
LiteScope AFM-in-SEM dimensions

LiteScope - scan head

LiteScope is an AFM designed for fast and easy integration within SEM (operational as a standalone AFM as well).

Supports Correlative Probe and Electron Microscopy technology (CPEM).

  • Comprehensive surface characterization – material mechanical, magnetic, electro-mechanical and electric properties
  • Compact design compatible with most SEM systems
  • Easy SEM mounting or removal in less than five minutes
  • Compatible with FIB, GIS, EDX, and other accessories
  • Self-sensing probes without optical detection or laser adjustment
  • Special accessories and modules


Nenobox - control unit

All electronics running LiteScope are integrated into one control unit, which replaces the need for an additional dedicated computer. This unit is a standard 19” rack and may be easily mounted in a free slot of SEM electronics or simply placed free to match the needs of the task at hand.

NenoView software

NenoView - control software

NenoView is a user-friendly software, which allows to fully control and set-up measurements, data acquisition and processing. NenoView supports CPEM technology and enables direct use of the correlative imaging.

  • Web-based user interface
  • Remote access to user data
  • Remote experiment control via tablet, smartphone, etc.
  • SEM and AFM channels can be selected, viewed, and recorded at the same time
  • Saves the data with all the information including measurement setup
  • User accounts individually configurable
  • Enables data downloading from control PC to local computer
  • Integrated data postprocessing, analysis, export, etc.
  • Compatible with Gwyddion or MountainsSPIP software for further data postprocessing

Technical specification

Dimensions XYZ118 mm x 84 mm x 35.7-48.4 mmScan range in open loop XYZ (±10%)100 μm x 100 μm x 20 μm
Total weight460 gScan range in closed loop XYZ80 μm x 80 μm x 16 μm
Vacuum working range105 Pa to 10-5 PaResolution XYZ up to0.2 nm x 0.2 nm x 0.04 nm
Operating temperature+10 °C to +35 °CMaximum sample height8 mm
Maximal scanned sample area XYZ21 mm x 11 mm x 8 mmMaximum sample weight100 g