Unique Atomic Force Microscope LiteScope is designed to merge the strengths of AFM and SEM techniques, resulting in effective workflow and extending the possibilities of correlative microscopy and in-situ analysis that ware difficult or almost impossible by conventional instrumentation.
Simultaneous AFM and SEM measurement allows nanometer precise data correlation, making LiteScope a powerful tool for a variety of fields such as Material science, Nanotechnology, Semiconductors, Life science and other areas of research and industry.
Benefits of AFM-in-SEM solution
Cutting-edge CPEM technology allows the simultaneous acquisition of AFM and SEM data and their seamless correlation.
In-situ conditions inside the SEM ensure sample analysis at the same time, in the same place and under the same conditions.
Extremely precise and timesaving approach uses SEM to navigate the AFM tip to the region of interest, enabling its fast & easy localization.
Novel method of correlative imaging
Complex, yet time-efficient analysis via Correlative Probe and Electron Microscopy (CPEM) allows 3D correlative imaging that eliminates the need for repetitive tasks previously required to achieve similar kind of results.
All-in-one solution for automated in-situ analysis of multiple material properties enables unique combination of data such as topography, material contrast, mechanical or electrical properties resulting in three dimensional CPEM images.
Complex in-situ characterisation
AFM brings new inside-to-SEM method of characterisation, enabling the analysis of a broad range of properties:
Material mechanical properties
- local elastic properties (tapping & contact mode)
- local sample hardness (non-topographic)
- depth-dependent material characterization
- various in-situ operations
Material magnetic properties
- magnetic domain imaging
Material electro-mechanical properties
- piezoelectric domain imaging
Material electrical properties
- conductivity map (including insulated areas)
- local surface potential
- local electrical properties (non-topographic)
- sub-nanometer topography
- LiteScope – scan head
- NenoBox – control unit
- NenoView – control software
- SEM adaptation plate
- Vacuum feedthrough
LiteScope - scan head
LiteScope is an AFM designed for fast and easy integration within SEM (operational as a standalone AFM as well).
Supports Correlative Probe and Electron Microscopy technology (CPEM).
- Comprehensive surface characterization – material mechanical, magnetic, electro-mechanical and electric properties
- Compact design compatible with most SEM systems
- Easy SEM mounting or removal in less than five minutes
- Compatible with FIB, GIS, EDX, and other accessories
- Self-sensing probes without optical detection or laser adjustment
- Special accessories and modules
Nenobox - control unit
All electronics running LiteScope are integrated into one control unit, which replaces the need for an additional dedicated computer. This unit is a standard 19” rack and may be easily mounted in a free slot of SEM electronics or simply placed free to match the needs of the task at hand.
NenoView - control software
NenoView is a user-friendly software, which allows to fully control and set-up measurements, data acquisition and processing. NenoView supports CPEM technology and enables direct use of the correlative imaging.
- Web-based user interface
- Remote access to user data
- Remote experiment control via tablet, smartphone, etc.
- SEM and AFM channels can be selected, viewed, and recorded at the same time
- Saves the data with all the information including measurement setup
- User accounts individually configurable
- Enables data downloading from control PC to local computer
- Integrated data postprocessing, analysis, export, etc.
- Compatible with Gwyddion or MountainsSPIP software for further data postprocessing
|Dimensions XYZ||118 mm x 84 mm x 35.7-48.4 mm||Scan range in open loop XYZ (±10%)||100 μm x 100 μm x 20 μm|
|Total weight||460 g||Scan range in closed loop XYZ||80 μm x 80 μm x 16 μm|
|Vacuum working range||105 Pa to 10-5 Pa||Resolution XYZ up to||0.2 nm x 0.2 nm x 0.04 nm|
|Operating temperature||+10 °C to +35 °C||Maximum sample height||8 mm|
|Maximal scanned sample area XYZ||21 mm x 11 mm x 8 mm||Maximum sample weight||100 g|