LiteScope offers an AFM-in-SEM approach to semiconductor research and development. Thanks to LiteScope's singular setup and use of self-sensing probes, you will be able to measure electrical properties, localize defects and isolate structures. A wide range of measurement modes will enable you to measure exactly the properties you need.
The AFM-in-SEM correlative in-situ analysis have a broad use within the industry, e. g. for integrated circuits, MEMS & NEMS or solar cells analysis. Discover the new step in semiconductor manufacturing, failure analysis and reliability testing!