Complementary SEM-AFM of Swelling Bi-Fe-O Film

The delamination of bismuth ferrite prepared by atomic layer deposition (ALD) on highly oriented pyrolytic graphite (HOPG) substrate was studied. The topography of Bi-Fe-O thin films was studied under atmospheric conditions and in a vacuum using the Correlative Probe and Electron Microscopy (CPEM). Besides advanced correlative imaging, installing AFM into the SEM enabled protection from acoustic vibrations, thermal drift, and other noise exposure. The complementary AFM and SEM analysis provided the possibility of testing the mechanical properties by using pressure.

Read the whole article