LiteScope Featured in a Breakthrough Study on Electron-Beam-Excited Conductive AFM

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A new study has succesfully demonstrated Electron-Beam-Excited Conductive AFM (EBC-AFM) on semiconductive 2D materials – an approach that removes the need for back-contact and time consuming sample manipulation required with traditional conductive AFM. Instead, the SEM’s electron beam generates charge carriers that close the circuit with the AFM tip, making it possible to carry out fast, non-destructive electrical mapping of 2D materials, including full wafers.

We would like to congratulate the authors of “Electron-Beam Excited Conductive Atomic Force Microscopy for Back Contact Free, Wafer-Scale and In-Line Compatible Electrical Characterization of 2D Materials” on this important achievement.

The experiments were performed with LiteScope AFM-in-SEM and piezoresistive probes, integrated into Thermo Fisher Nova-200 and Helios 5 UX SEMs. The results highlight how AFM-in-SEM can extend conductive AFM techniques from research labs towards in-line semiconductor metrology and wafer-scale quality control.

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Scientific articles | 02. 09. 2025 | by Advanced Science

Material Science