Projects realized by NenoVision

TACOM - Development of correlative AFM and SEM/AirSEM microscope

Project No.: TM 03000033


The project is co-financed with the support of Technology agency of the Czech Republic within the framework of the Program DELTA2.


The aims of the project were set as follows:


1) To innovate and commercialize new methods and state-of-the-art instrumentation in correlative probe-electron (AFM-SEM) microscopy.


2) To develop (HW, SW, methods), demonstrate, and promote the use of the correlative AFM and SEM microscopy for key topical applications in photovoltaics, photocatalysis, nanolithography, nanodevices, biosensors, and life sciences.


3) To develop the worldwide first Tabletop AirSEM integrated with AFM and demonstrate its use for state-of-art correlative AFM-SEM microscopy under ambient conditions.


NenoVision company closely cooperates with several academic partners within this project: Czech University of Technology in Prague, Faculty of Electrical Engineering; Jeonbuk National University; Korea Institute of Science and Technology

Vývoj a optimalizace metodiky měření pro zařízení LiteScope

Vývoj a optimalizace metodiky měření pro zařízení LiteScope


Číslo projektu: CZ.01.1.02/0.0/0.0/20_358/0027762


Projekt je financován Evropskou unií.


Tento projekt je zaměřený na spolupráci s Ústavem fyziky materiálů AV ČR, v. v. i.

Konkrétně řeší problematiku vývoje a optimalizace metodiky dvouprůchodového měření proudu indukovaného elektronovým svazkem, která eliminuje parazitní složku zdánlivého EBIC proudu způsobenou sekundárními elektrony a implementaci této metodiky pro LiteScope AFM-in-SEM. Projekt posiluje naše vlastní inovační aktivity. 

Technology agency of the Czech Republic

INCHAR - Development of in-situ techniques for characterization of materials and nanostructures


Project No.: FW 03010504


The project is co-financed with the support of Technology agency of the Czech Republic within the framework of the Program TREND.


The aim of the project is to develop new technologies for the LiteScope device expanding its imaging capabilities with functionalities that will attract new users-customers and help Nenovision to establish itself in developed foreign markets. Three areas have been identified that will allow the necessary technological and commercial advantage to be obtained. The project covered development of:


a) unique multifunctional probes for scanning probe microscopy with the possibility of applying electrical voltage, intense laser light and a working gas through a probe cavity to the sample surface,


b) highly compact device for in-situ mechanical loading,


c) very own precision probes and automated etching equipment for their electrochemical preparation and their characterization.


NenoVision company closely cooperates with several academic partners within this project: Brno University of Technology – Institute of Physical Engineering, Institute of Physics of Materials of Czech Academy of Sciences and Institute of Scientific Instruments of Czech Academy of Sciences.

Methodology for evaluation of layer morphology by AFM in SEM

Methodology for evaluation of layer morphology by AFM in SEM


Project No.: CZ.01.1.02/0.0/0.0/20_358/0026199


This project is financed by European Union.


In this project NenoVision will cooperate with Technical University Ostrava – VSB, Nanotechnology centre on the development of methods for evaluation of layer morphology by AFM microscope LiteScope integrated into electron microscope. More concretely – two techniques will be involved:


1. Research of corrosion and abrasion resistive layers prepared by microarc oxidation (MAO) of aluminium alloys.


2. Research of duplex orthopaedic and traumatological coats combining PVD (physical vapour deposition) layers of titanium and zirconium with microarc oxidation (MAO).


New measurement techniques will widen the application portfolio of AFM microscope LiteScope and as such will help to increase the marketing potential of this device.

Correlative measurement of surface magnetic properties

“Correlative measurement of surface magnetic properties“


Project no.: CZ.01.1.02/0.0/0.0/20_358/0023778


This project is financed by European Union.


The aim of the project is to widen the portfolio of correlative AFM/SEM measurement methods for LiteScope device and to increase its attractivity in correlative microscopy market. In cooperation with the Institute of Physics of Materials NenoVision company is going to examine the possibilities of exploitation of electric probes for characterisation of special changes of magnetic moments on plastically deformed materials.

Technology agency of the Czech Republic

“GEFSEM - Next Generation of Integrated Atomic Force and Scanning Electron Microscopy”


Project No. FW1010183


This project is co-financed with the support of Technology agency of the Czech Republic within the Program TREND framework.


The aim is to strengthen competitiveness and commercial potential of NenoVision's LiteScope on the international market with the help of next generation equipment and accessories. These innovations will focus on 4 areas that represent the project's sub-goals:


a) Upgrade of hardware devices - development of new HW modules that allow sample rotation, cooling, heating and probe loading through Load-Lock of electron microscopes.


b) Software development of image analysis procedures which are obtained by multilevel correlation techniques.


c) Development of applications and examples of correlative techniques combining AFM/SEM with the use of newly developed hardware and software modules.


d) Cooperation between NenoVision and academic partners with transfer of experience, know-how and technology.

Ministry of Industry and Trade of the Czech Republic

“POMITE – Advanced microscopy techniques”


Project No. FV 40238


POMITE project is implemented with the financial support from the state budget via the Ministry of Industry and Trade of the Czech Republic via the TRIO program.


The aim of the POMITE project is to develop new applications for AFM microscope LiteScope that will allow it´s wider commercial use. Within the POMITE project three areas for innovations of the LiteScope product are identified:


a) Fast imaging – acceleration of the measuring time thanks to up-grade of selected components.


b) Nanoindentation – innovation of the LiteScope with techniques that enable the users to characterize mechanical features of their samples.


c) Development of software and other instruments that help with interpretation of data for correlative imaging and advanced microscopy techniques.

Technology agency of the Czech Republic

“Process monitoring and failure analysis solutions for energy- efficient devices and products in microelectronics”


Project No.TH4010525


The project is co-financed with the support of Technology agency of the Czech Republic within the framework of the Program for applied research EPSILON.


The project responds to the current semiconductor industry market demand for appliances for that would help during production with finding fault electronic parts on the level of wafers. The aim of the project is to establish new type of appliance based on unique technologies before the competitors. To accomplish this aim, the project forms a consortium of project partners with unique know-how in different fields.


The project is directly linked to Czech – German cooperation project Cool PROMO coordinated by Silicon Saxony Management GmbH.

The Ministry of Education, Youth, and Sports

“MARS – Market Ready Self-sensing probes for a wide range of applications in Scanning probe microscopy”


Project No 17-0907 MARS/LTE 218002


The international Czech-Polish-German project was awarded with EURIPIDES 2 label and NenoVision is its coordinator. Czech part of the project was supported by The Ministry of Education, Youth, and Sports from the subprogram INTER-EUREKA of the INTER – EXCELLENCE program.


Project MARS is focused on development of new self-sensing probes with unique nano3Dsense technology. AFM microscope LiteScope – the product of NenoVision company and other equipment focused on special AFM applications are used in the development process of those novel probes. Full exploitation of the self-sensing technology will lead to novel and more flexible probes, that can fulfil unsatisfied demands of an emerging market.

Innovation Voucher: “Characterisation of functional nanomaterials by corelative techniques by Litescope”

Innovation Voucher: “Characterisation of functional nanomaterials by corelative techniques by Litescope”


Project No.CZ.01.1.02/0.0/0.0/18_215/0019476


The project is co-financed by European Union.


The project allows NenoVision company to create 2 new methodologies for its innovative product LiteScope:


1. AFM/SEM measurement of ultrasmooth ceramics composite materials and analysis of morphology and topology of the surface of those materials.


2. Detailed identification of defects with the help of methodology of SEM/EDX and AFM measurement of thin layers prepared with PVD, CVD a PACVD technology.


The development of those methods will be realized in close collaboration with Nanotechnology centre of VSB - Technical University Ostrava.

Innovation Voucher: “Measurement methodology of local electrical properties by LiteScope”

Innovation Voucher: “Measurement methodology of local electrical properties by LiteScope”


Project No.CZ.01.1.02/0.0/0.0/17_205/0019149


The project is co-financed by European Union.


The project is focused on development of new applications for LiteScope device and increasing its market competitiveness.


In the framework of the project NenoVision with the cooperation of the Institute of Physics of Materials of the Czech Academy of Science is developing methodology for semiconductor industry that allows localisation of defects that are electrically active or defects of integrated circuits. 

Technology Agency of the Czech Republic

“Development of SPM applications suitable for correlative microscopy”


Project No.TJ 1000434


This project is co-financed with the state support of Technology Agency of the Czech Republic within the framework of the Program for applied research ZÉTA.


The project objective is to involve young researchers from Brno University of Technology into development of LiteScope. LiteScope is a main product of NenoVision company. The recipient of the grant – CEITEC BUT is, with the help of NenoVision company, testing advanced SPM techniques and its applications. The measurements are, with the help of correlative microscopy CPEM, primarily focusing on observing electrical, magnetic, and mechanical properties of the samples and its interpretations. The results of the measurements are serving as a base for further innovations of the device LiteScope, so it meets the needs of wide range of customers.

Innovation Voucher: “Metrological characterization of Scanning Probe Microscope”

Innovation Voucher: “Metrological characterization of Scanning Probe Microscope”


Project No. CZ.01.1.02/0.0/0.0/17_205/0015059


Je spolufinancován Evropskou unií


The aim of the project is overall characterization of AFM microscope LiteScope that will lead to detailed specification and prospectively to its adaptation.


The project is realised in cooperation with Czech Metrology Institute.

Innovation Voucher: “AFM topography – LiteScope”


Innovation Voucher: “AFM topography – LiteScope”


Project No.CZ.01.1.02/0.0/0.0/17_205/0015058


This project is co-financed by European Union.


This project allows further development of AFM microscope LiteScope in the field of research of connection between the structure of a material and its physical properties. Data and information obtained during the cooperation between the Institute of Physics of Materials of Czech Academy of Science and NenoVision are used in the further development and production of LiteScope.

Innovation Voucher: “LiteScope and 3D maps”

Innovation Voucher: “LiteScope and 3D maps”


Project No.CZ.01.1.02/0.0/0.0/17_115/0012729  


This project is co-financed by European Union.


This project deals with changes in LiteScope settings and customization of SW equipment to increase LiteScope utilization for imaging material inhomogeneities and surface discontinuities.

“Project of the protection of Industrial property rights – NenoVision s.r.o.”

“Project of the protection of Industrial property rights – NenoVision s.r.o.”


Project No.CZ.01.1.02/0.0/0.0/15_030/0010401 


This project is co-financed by European Union.


The aim of this project is to apply for International protection of new technical solution LiteScope.