3D Surface Roughness Measurement of Core–Shell Microparticles

3D Surface Roughness Measurement of Core–Shell Microparticles

Researchers used AFM-in-SEM LiteScope to develop a new method for measuring the surface roughness of spherical microparticles. By integrating AFM with SEM, LiteScope enabled quasi-3D roughness data, providing more detailed analysis than traditional 2D methods.

Researchers have developed a new algorithm to measure the roughness of spherical microparticles using scanning electron microscopy (SEM). Traditionally, SEM images only provide two-dimensional roughness data, but this new approach allows for quasi-3D information by tilting the sample to capture different angles. The method was tested on specially designed microparticles, proving its effectiveness in analyzing surface roughness. The study also utilized AFM-in-SEM LiteScope, which enabled the integration of atomic force microscopy (AFM) directly into the SEM for complementary surface analysis. This combination provided a comprehensive comparison of roughness results and offered a practical solution for improving quality control in industries using microparticles.



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