CPEM™ – The Novel Technology for 3D Material Surface Analysis

One of the key steps in the progress in scientific instrumentation and analytical methods is the development of assembling of various techniques into the compact apparatus. Atomic Force Microscopy (AFM) and Scanning Electron Microscopy (SEM) are both well established and commonly used techniques for nanoworld imaging. These technologies were already integrated in the past but their imaging techniques were used separately. Correlative Probe and Electron Microscopy (CPEM) is based on a different principle than the traditional approach and it enables simultaneous acquistition of various signals including the AFM surface topography and mechanical properties, and SEM signals, such as SE and BSE.

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