AFM in SEM as a Tool for Comprehensive Sample Analysis

The need to characterize and analyze structures in the (sub)nanometer range is growing. The complexity of measuring methods and advanced instruments in this field also creates a demand for innovatory ways of correlative analysis, easy-to-use instrumentation, and automated procedures. To tackle these market demands, NenoVision has developed a unique AFM LiteScope, designed for easy integration into the SEM. The motivation behind this hybrid system design is twofold – first, it allows for efficient, yet complex in-situ sample characterization. Second, it brings completely new possibilities for advanced correlative imaging and analyzing samples in a way that was difficult or impossible by separate SEM and AFM systems.

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