LiteScope™

Atomic Force Microscope designed for easy integration into the Scanning Electron Microscopes. The combination of complementary AFM and SEM techniques enables you to use the advantages of both commonly used microscopy techniques.

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LiteScope™: Main benefits

Why LiteScope?

Scanning electron microscopy (SEM) and atomic force microscopy (AFM) are the two most used techniques for sample analysis at the nanoscale. The combination of complementary AFM in SEM enhances the capabilities of both techniques. It allows you to get precise in-time image correlation without limiting the imaging options of either system.

It opens up completely new possibilities for:

Advanced surface characterization
Novel measurement techniques
Applications that can’t be measured by separate AFM and SEM techniques

AFM-in-SEM measurement is time-efficient, precise and it provides complex sample analysis while preventing sensitive samples from surface contamination and oxidation.

AFM in SEM benefits

Material vs. topography contrast
Precise AFM tip navigation
In-situ 3D topography and profiling
Roughness measurement
In-time AFM and SEM data correlation (CPEM)

Key LiteScope features

Plug-and-play SEM integration
Compatible with FIB, GIS, EDX, and other SEM accessories
Wide range of measuring modes
Supports a variety of self-sensing probes through corresponding probe holders
User-friendly operation, web-based software with easy remote access from any computer