Atomic Force Microscope designed for easy integration into the Scanning Electron Microscopes. The combination of complementary AFM and SEM techniques enables you to use the advantages of both commonly used microscopy techniques.

AFM in SEM LiteScope

Why LiteScope?

Scanning electron microscopy (SEM) and atomic force microscopy (AFM) are the two most used techniques for sample analysis at the nanoscale. The combination of complementary AFM in SEM enhances the capabilities of both techniques. It allows you to get precise in-time image correlation without limiting the imaging options of either system.

It opens up completely new possibilities for:

  • ​​Advanced surface characterization
  • Novel measurement techniques
  • Applications that can’t be measured by separate AFM and SEM techniques
AFM in SEM LiteScope

Measuring with LiteScope is intuitive and simple, yet precise and time-efficient. Its integration into the SEM prevents sensitive samples from contamination or oxidation as the measuring is done in the same place and under the same conditions and enables precise localization of the region of interest and AFM tip navigation. It extends the capabilities of SEM by measuring a sub-nanometer topography together with mechanical, electrical, and magnetic properties of the sample.

Atomic force microscopy vs electron microscopy

LiteScope benefits scheme

LiteScope incorporates a unique imaging technique called Correlative Probe and Electron Microscopy, shortly CPEM, enabling simultaneous acquisition of AFM and SEM data. LiteScope and the CPEM technology allow sample analysis in a way that was difficult or impossible by the two imaging technologies separately.

Together they bring new possibilities for advanced correlative imaging in a variety of scientific and industrial fields such as Material Sciences, Nanostructures, Semiconductors or Solar cells industry, Life sciences, and many more, defining their own category of correlative microscopy.

AFM in SEM benefits

  • Material vs. topography contrast
  • Precise AFM tip navigation
  • In-situ 3D topography and profiling
  • Roughness measurement
  • In-time AFM and SEM data correlation (CPEM)

Key LiteScope features