LiteScope™

Atomic Force Microscope designed for easy integration into the Scanning Electron Microscopes. The combination of complementary AFM and SEM techniques enables you to use the advantages of both commonly used microscopy techniques.

LiteScope2 render

AFM in SEM - Next level of imaging

Key added values

Complex sample analysis

Unique technology of multidimensional correlative imaging enables simultaneous acquisition of data from SEM and AFM, and their seamless correlation into 3D images. 

In-situ conditions

All measurements are done at the same time, in the same place and under the same conditions, preventing the need of sample transfer and risk of contamination during analyses.

Precise localization of the region of interest

Extremly precise and time saving approach using SEM to localize and navigate the AFM to the region of interest.

Key benefits

Enhancement of SEM capabilities

AFM in SEM enhances the capabilities of both techniques, enabling complex sample analysis of electrical, mechanical and magnetic properties inside SEM.

Ultimate precision of correlative imaging

Unique Correlative Probe and Electron Microscopy (CPEM) technology enables simultaneous acquisition and correlation of the chosen SEM and AFM channels. 

Fast & easy localization of region of interest

SEM helps to quickly localize the region of interest and to precisely navigate the AFM tip.

In-situ analysis - no risk of sample contamination 

In-situ conditions inside the SEM ensure sample analysis at the same time, in the same place and under the same conditions. 

Extension of 2D SEM image into 3D

SEM material contrast is enhanced by the information about sub-nanometer 3D topography and roughness.