Atomic Force Microscope designed for easy integration into the Scanning Electron Microscopes. The combination of complementary AFM and SEM techniques enables you to use the advantages of both commonly used microscopy techniques.


Why LiteScope?

Scanning electron microscopy (SEM) and atomic force microscopy (AFM) are the two most used techniques for sample analysis at the nanoscaleThe combination of complementary AFM in SEM enhances the capabilities of both techniques. It allows you to get precise in-time image correlation without limiting the imaging options of either system.

It opens up completely new possibilities for:


AFM-in-SEM measurement is time-efficient, precise and it provides complex sample analysis while preventing sensitive samples from surface contamination and oxidation.

LiteScope benefits scheme

AFM in SEM benefits

  • Material vs. topography contrast
  • Precise AFM tip navigation
  • In-situ 3D topography and profiling
  • Roughness measurement
  • In-time AFM and SEM data correlation (CPEM)

Key LiteScope features

  • Plug-and-play SEM integration
  • Compatible with FIB, GIS, EDX, and other SEM accessories
  • Wide range of measuring modes
  • Supports a variety of self-sensing probes through corresponding probe holders
  • User-friendly operation, web-based software with easy remote access from any computer